Interaction between self-interstitials and the oxygen dimer in silicon

Lindstrom, J.L.Lindström, J.L., Department of Physics - Solid State Physics, University of Lund, PO Box 118, SE-221 00 Lund, Sweden (författare)

Interactions between the oxygen dimer (O2i) and silicon self-interstitials (I) and vacancies (V) have been studied in Czochralski-grown silicon (Cz-Si) crystals using infrared absorption and deep level transient spectroscopies. The focus in this report is on reactions of O2i with I. The first step in this interaction is found to be the formation of a self-interstitial-dioxygen centre (IO2i) with oxygen-related local vibrational mode (LVM) bands at 922 and 1037 cm-1. During the second formation step, another centre, I2O2i, with LVM bands at 918 and 1034 cm-1 is suggested to appear. A Si-related band at about 545 cm-1 is also assigned to both the IO2i and I2O2i centres. The IO2i centre is found to be electrically active with an acceptor level at Ec - 0.11 eV. The both defects, IO2i and I2O2i, are stable at room temperature and anneal out at about 400 and 550 K, respectively. © 2001 Elsevier Science B.V. All rights reserved.

Hallberg, T.Defence Research Establishment, PO Box 1165, SE-581 11, Linkoping, Sweden (författare)
Hermansson, J.Department of Physics - Solid State Physics, University of Lund, PO Box 118, SE-221 00 Lund, Sweden (författare)
Murin, L.I.Institute of Solid State and Semiconductor Physics, 220072 Minsk, Belarus (författare)
Komarov, B.A.Institute of Solid State and Semiconductor Physics, 220072 Minsk, Belarus (författare)
Markevich, V.P.Institute of Solid State and Semiconductor Physics, 220072 Minsk, Belarus, Centre for Electronic Materials, UMIST, Manchester M60 1QP, United Kingdom (författare)
Kleverman, M.Department of Physics - Solid State Physics, University of Lund, PO Box 118, SE-221 00 Lund, Sweden (författare)
Svensson, B.G.Solid State Electronics, Royal Institute of Technology, SE-164 40 Kista, Sweden (författare)
Lindström, J.L., Department of Physics - Solid State Physics, University of Lund, PO Box 118, SE-221 00 Lund, SwedenDefence Research Establishment, PO Box 1165, SE-581 11, Linkoping, Sweden (creator_code:org_t)

Av författaren/redakt...: Lindstrom, J.L.; Hallberg, T.; Hermansson, J.; Murin, L.I.; Komarov, B.A.; Markevich, V.P.; visa fler...; Kleverman, M.; Svensson, B.G.; visa färre...

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