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Mechanical and trib...
Mechanical and tribological properties of CNx films deposited by reactive magnetron sputtering
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Broitman, E. (författare)
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Hellgren, N. (författare)
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- Wanstrand, O. (författare)
- Wänstrand, O., Department of Materials Science, Ångström Laboratory, Uppsala University, SE-751 21 Uppsala, Sweden
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Johansson, M.P. (författare)
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- Berlind, Torun (författare)
- Linköpings universitet,Tekniska högskolan,Tillämpad optik
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- Sjostrom, H. (författare)
- Sjöström, H., Sjöstrom Coating Consulting, KarlGustavsgatan 21A, SE-411 20 Göteborg, Sweden
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- Sundgren, J.-E. (författare)
- Office of the President, Chalmers University of Technology, SE-412 96 Göteborg, Sweden
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- Larsson, M. (författare)
- Department of Materials Science, Ångström Laboratory, Uppsala University, SE-751 21 Uppsala, Sweden
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- Hultman, Lars (författare)
- Linköpings universitet,Tekniska högskolan,Tunnfilmsfysik
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Wänstrand, O, Department of Materials Science, Ångström Laboratory, Uppsala University, SE-751 21 Uppsala, Sweden Tekniska högskolan (creator_code:org_t)
- 2001
- 2001
- Engelska.
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Ingår i: Wear. - 0043-1648 .- 1873-2577. ; 248:1-2, s. 55-64
- Relaterad länk:
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https://urn.kb.se/re...
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https://doi.org/10.1...
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Abstract
Ämnesord
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- The hardness, elasticity, wear rate and friction coefficient of carbon nitride (CNx) films of defined microstructure and composition are presented. CNx films were deposited by dc reactive magnetron sputtering from a C target in N2/Ar plasma. Films were grown on Si (001), Ni, and HSS substrates to thickness of ~0.5 µm at a total pressure of 3 mTorr with the N2 fraction varied from 0 to 1, and the substrate temperature Ts, varied from ambient to 350°C. The mechanical and tribological properties of the coatings were evaluated by nanoindentation and dry ball-on-disk test. For CNx (0 = x = 0.35) films deposited below 200°C (amorphous structure), the elastic recovery and hardness do not change significantly with increasing N concentration, however, the friction coefficient increases from 0.19 to 0.45, while the coating wear rate is low. For CNx (0 = x = 0.15) films grown at Ts = 350°C, where a transition from a graphite-like to a "fullerene-like" phase occurs, a dramatic increase in hardness and elasticity is observed. Furthermore, the rms surface roughness decreases from 15.0 to 0.4 nm. For 0.15 = x = 0.20, CNx films deposited at Ts = 350°C (fullerene-like phase) exhibit a smooth surface, high hardness and elasticity (~90% recovery), and a coefficient of friction against hard steel of ~0.25. For all substrates, film friction coefficient tends to increase as the nitrogen content in the film is increased. Results also indicate the formation of a transfer layer which improves the tribological properties of the films. © 2001 Elsevier Science B.V. All rights reserved.
Nyckelord
- Magnetron sputtering
- Mechanical properties
- Tribological properties
- TECHNOLOGY
- TEKNIKVETENSKAP
Publikations- och innehållstyp
- ref (ämneskategori)
- art (ämneskategori)
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