Electrical peculiarities in Al/Si/Ge/... /Ge/Si and Al/SiGe/Si structures

• The current-voltage (I-V) and capacitance-voltage (C-V) behaviour of different Si/Ge multilayers and SiGe single layers prepared on p-type Si substrates by magnetron sputtering and annealing, has been studied in the temperature rang, of 80-320 K by using Al Schottky contacts as test structures. Although a significant influence of the microstructure of the Si/Ge multilayers and SiGe layers was obtained on the electrical behaviour of the structures, the structures exhibited similar specific features. (C) 2002 Elsevier Science B.V. All rights reserved.

Nyckelord

Si

SiGe

Schottky barrier

superlattice

amorphous

electrical behaviour

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