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Real-time assessmen...
Real-time assessment of overlayer removal on 4H-SiC surfaces : Techniques and relevance to contact formation
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- Edwards, NV (författare)
- Linkoping Univ, Dept Phys, SE-58183 Linkoping, Sweden N Carolina State Univ, Raleigh, NC USA Tech Univ Berlin, Inst Festkorperphys, DE-13355 Berlin, Germany
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- Madsen, LD (författare)
- Linkoping Univ, Dept Phys, SE-58183 Linkoping, Sweden N Carolina State Univ, Raleigh, NC USA Tech Univ Berlin, Inst Festkorperphys, DE-13355 Berlin, Germany
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- Robbie, K (författare)
- Linkoping Univ, Dept Phys, SE-58183 Linkoping, Sweden N Carolina State Univ, Raleigh, NC USA Tech Univ Berlin, Inst Festkorperphys, DE-13355 Berlin, Germany
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visa fler...
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- Powell, GD (författare)
- Linkoping Univ, Dept Phys, SE-58183 Linkoping, Sweden N Carolina State Univ, Raleigh, NC USA Tech Univ Berlin, Inst Festkorperphys, DE-13355 Berlin, Germany
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- Järrendahl, Kenneth (författare)
- Linköpings universitet,Tekniska högskolan
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- Cobet, C (författare)
- Linkoping Univ, Dept Phys, SE-58183 Linkoping, Sweden N Carolina State Univ, Raleigh, NC USA Tech Univ Berlin, Inst Festkorperphys, DE-13355 Berlin, Germany
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- Esser, N (författare)
- Linkoping Univ, Dept Phys, SE-58183 Linkoping, Sweden N Carolina State Univ, Raleigh, NC USA Tech Univ Berlin, Inst Festkorperphys, DE-13355 Berlin, Germany
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- Richter, W (författare)
- Linkoping Univ, Dept Phys, SE-58183 Linkoping, Sweden N Carolina State Univ, Raleigh, NC USA Tech Univ Berlin, Inst Festkorperphys, DE-13355 Berlin, Germany
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- Aspnes, DE (författare)
- Linkoping Univ, Dept Phys, SE-58183 Linkoping, Sweden N Carolina State Univ, Raleigh, NC USA Tech Univ Berlin, Inst Festkorperphys, DE-13355 Berlin, Germany
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visa färre...
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(creator_code:org_t)
- 2000
- 2000
- Engelska.
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Ingår i: Materials Science Forum. - 0255-5476 .- 1662-9752. ; 338-3, s. 1033-1036
- Relaterad länk:
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https://urn.kb.se/re...
Abstract
Ämnesord
Stäng
- We applied real-time spectroscopic ellipsometric (SE) measurements to assess the removal of overlayer material from 4H-SiC Si- and C-face surfaces in order to investigate the final step of an otherwise standard RCA cleaning regimen commonly used to prepare SiC surfaces for contact formation. The selected treatments (buffered hydrofluoric acid (HF), concentrated HF, dilute HF and 5% HF in Methanol) removed 4 to 40 Angstrom of effective SiO2 overlayer thickness from these surfaces. We also found that the concentrated HF treatment yielded the best surface, i.e. the most abrupt bulk-to-ambient transition region.
Nyckelord
- cleaning
- contact
- spectroscopic ellipsometry
- surface preparation
- synchrotron
- TECHNOLOGY
- TEKNIKVETENSKAP
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