Search: (WFRF:(Li Yi)) lar1:(liu)
> (2005-2009) >
Spectroscopic ellip...
-
Mendoza-Galvan, ArturoLinköpings universitet,Tillämpad optik,Tekniska fakulteten
(author)
Spectroscopic ellipsometry analysis of silicon nanotips obtained by electron cyclotron resonance plasma etching
- Article/chapterEnglish2009
Publisher, publication year, extent ...
Numbers
-
LIBRIS-ID:oai:DiVA.org:liu-51256
-
https://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-51256URI
Supplementary language notes
-
Language:English
-
Summary in:English
Part of subdatabase
Classification
-
Subject category:ref swepub-contenttype
-
Subject category:art swepub-publicationtype
Notes
-
Silicon nanotips fabricated by electron cyclotron resonance plasma etching of silicon wafers are studied by spectroscopic ellipsometry. The structure of the nanotips is composed of columns 100-140 nm wide and spaced by about 200 nm. Ellipsometry data covering a wide spectral range from the midinfrared to the visible are described by modeling the nanotip layer as a graded uniaxial film using the Bruggeman effective medium approximation. The ellipsometry data in the infrared range reveal two absorption bands at 754 and 955 cm(-1), which cannot be resolved with transmittance measurements. These bands indicate that the etching process is accompanied with formation of carbonaceous SiC and CHn species that largely modify the composition of the original crystalline silicon material affecting the optical response of the nanotips. (C) 2009 Optical Society of America
Subject headings and genre
-
NATURAL SCIENCES
-
NATURVETENSKAP
Added entries (persons, corporate bodies, meetings, titles ...)
-
Järrendahl, KennethLinköpings universitet,Tillämpad optik,Tekniska fakulteten(Swepub:liu)kenja53
(author)
-
Arwin, HansLinköpings universitet,Tillämpad optik,Tekniska högskolan(Swepub:liu)hanar75
(author)
-
Huang, Yi-FanNational Taipei University of Technology
(author)
-
Chen, Li-ChyongNational Taipei University of Technology
(author)
-
Chen, Kuei-HsienNational Taiwan University
(author)
-
Linköpings universitetTillämpad optik
(creator_code:org_t)
Related titles
-
In:APPLIED OPTICS48:26, s. 4996-50040003-6935
Internet link
Find in a library
To the university's database