Improvement of Crystalline and Photoluminescence of Atomic Layer Deposited m-Plane ZnO Epitaxial Films by Annealing Treatment

Yang, SNational Chiao Tung University, Taiwan National Chiao Tung University, Taiwan (author)

Funding Agencies|National Science Council of Taiwan|NSC-99-2221-E-009-095-MY3NSC-99-2112-M-006-017-MY3NSC-100-2112-M-213-002-MY3|
Monocrystalline m-plane ZnO epitaxial films with flat surface morphology were grown on m-plane sapphire by using atomic layer deposition. X-ray diffraction and transmission electron microscopy measurements verify not only the in-plane epitaxial relationship of the as-grown films as (10 (1) over bar0)andlt; 0001 andgt;(ZnO)parallel to(10 (1) over bar0)andlt;(1) over bar2 (1) over bar0 andgt; Al2O3 but also the absence of domains with undesirable orientations, which are generally obtained in the m-plane ZnO films grown by other methods. Experimental results indicate that the basal plane stacking fault (BSF) is the dominant structural defects that contribute to the emission at 3.31 eV in m-plane ZnO films. Exactly how thermal annealing affects the structural and optical properties of ZnO epi-films was also investigated. Additionally, based on time-resolved photoluminescence at 5 K, the decay time of BSF related emission and near-band-edge (NBE) emission were determined. Results of this work further demonstrated that the decay time of NBE emission increases with a higher annealing temperature, accompanied by an improvement in crystal structure.

Lin, B HNational Synchrotron Radiat Research Centre, Taiwan National Chiao Tung University, Taiwan National Chiao Tung University, Taiwan (author)
Kuo, C CNational Chiao Tung University, Taiwan National Chiao Tung University, Taiwan (author)
Hsu, H CLinköpings universitet,Halvledarmaterial,National Cheng Kung University, Taiwan National Cheng Kung University, Taiwan National Cheng Kung University, Taiwan (author)
Liu, W-RNational Synchrotron Radiat Research Centre, Taiwan National Chiao Tung University, Taiwan National Chiao Tung University, Taiwan (author)
Eriksson, M OLinköpings universitet,Halvledarmaterial,Tekniska högskolan(Swepub:liu)marer92 (author)
Holtz, Per-OlofLinköpings universitet,Halvledarmaterial,Tekniska högskolan(Swepub:liu)perho67 (author)
Chang, C-SNational Chiao Tung University, Taiwan National Chiao Tung University, Taiwan (author)
Hsu, C-HNational Synchrotron Radiat Research Centre, Taiwan National Chiao Tung University, Taiwan National Chiao Tung University, Taiwan (author)
Hsieh, W FNational Chiao Tung University, Taiwan National Chiao Tung University, Taiwan National Cheng Kung University, Taiwan National Cheng Kung University, Taiwan (author)
National Chiao Tung University, Taiwan National Chiao Tung University, TaiwanNational Synchrotron Radiat Research Centre, Taiwan National Chiao Tung University, Taiwan National Chiao Tung University, Taiwan (creator_code:org_t)

In:Crystal Growth & Design: American Chemical Society12:10, s. 4745-47511528-74831528-7505

By the author/editor: Yang, S; Lin, B H; Kuo, C C; Hsu, H C; Liu, W-R; Eriksson, M O; show more...; Holtz, Per-Olof; Chang, C-S; Hsu, C-H; Hsieh, W F; show less...

Kungliga biblioteket hanterar dina personuppgifter i enlighet med EU:s dataskyddsförordning (2018), GDPR. Läs mer om hur det funkar här.
Så här hanterar KB dina uppgifter vid användning av denna tjänst.