Comparison of Global Nonlinear Models and "Model-on-Demand" Estimation Applied to Identification of a RTP Wafer Reactor

• "Model on Demand" (MoD) simulation of the temperature dynamics in a simulated Rapid Thermal Process-ing (RTP) reactor is compared against various types of global models (ARX, semiphysical, combined semiphysical with neural net). The identication data is generated from a m-level pseudo-random sequence input whose parameters are specied systematically using a priori information readily available to the engineer. The MoD estimator outperforms the ARX model and two semi-physical models, while matching the performance of a combined semi-physical with neural net model. This makes MoD estimation an appealing alternative to global methods because of its reduced engineering eort and simplified a priori knowledge regarding model structure.

Subject headings

TEKNIK OCH TEKNOLOGIER  -- Elektroteknik och elektronik -- Reglerteknik (hsv//swe)

ENGINEERING AND TECHNOLOGY  -- Electrical Engineering, Electronic Engineering, Information Engineering -- Control Engineering (hsv//eng)

Keyword

Identification

Non-parametric estimation

TECHNOLOGY

TEKNIKVETENSKAP

Automatic control

Publication and Content Type

ref (subject category)

kon (subject category)