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Method of making a pressure sensor comprising a resonant beam structure
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- Stemme, Göran, 1958- (author)
- KTH,Mikrosystemteknik
- Kälvesten, Edvard (author)
- (creator_code:org_t)
- 1998
- English.
- Patent (pop. science, debate, etc.)
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- pat (subject category)
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