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Unravelling the ion...
Unravelling the ion-energy-dependent structure evolution and its implications for the elastic properties of (V,Al)N thin films
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- Karimi Aghda, Soheil (författare)
- RWTH Aachen University, Germany,Rhein Westfal TH Aachen, Mat Chem, Kopernikusstr 10, D-52074 Aachen, Germany
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- Music, Denis (författare)
- Malmö universitet,Institutionen för materialvetenskap och tillämpad matematik (MTM),Materials Science,Malmö Univ, Dept Mat Sci & Appl Math, S-20506 Malmö, Sweden
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- Unutulmazsoy, Yeliz (författare)
- Leibniz Institute of Surface Engineering (IOM), Germany,Leibniz Inst Surface Engn IOM, Permoserstr 15, D-04318 Leipzig, Germany
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- Han Sua, Heng (författare)
- RWTH Aachen University, Germany,Rhein Westfal TH Aachen, Mat Chem, Kopernikusstr 10, D-52074 Aachen, Germany
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- Mraz, Stanislav (författare)
- RWTH Aachen University, Germany,Rhein Westfal TH Aachen, Mat Chem, Kopernikusstr 10, D-52074 Aachen, Germany
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- Hans, Marcus (författare)
- RWTH Aachen University, Germany,Rhein Westfal TH Aachen, Mat Chem, Kopernikusstr 10, D-52074 Aachen, Germany
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- Primetzhofer, Daniel (författare)
- Uppsala universitet,Tillämpad kärnfysik
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- Anders, André (författare)
- Leibniz Institute of Surface Engineering (IOM), Germany; Leipzig University, Germany,Leibniz Inst Surface Engn IOM, Permoserstr 15, D-04318 Leipzig, Germany; Univ Leipzig, Felix Bloch Inst, Linnestr 5, D-04103 Leipzig, Germany
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- Schneider, Jochen M. (författare)
- RWTH Aachen University, Germany,Rhein Westfal TH Aachen, Mat Chem, Kopernikusstr 10, D-52074 Aachen, Germany
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(creator_code:org_t)
- Elsevier, 2021
- 2021
- Engelska.
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Ingår i: Acta Materialia. - : Elsevier. - 1359-6454 .- 1873-2453. ; 214
- Relaterad länk:
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https://doi.org/10.1...
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https://uu.diva-port... (primary) (Raw object)
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https://urn.kb.se/re...
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https://doi.org/10.1...
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https://urn.kb.se/re...
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Abstract
Ämnesord
Stäng
- Ion irradiation-induced changes in the structure and mechanical properties of metastable cubic (V,Al)N deposited by reactive high power pulsed magnetron sputtering are systematically investigated by correlating experiments and theory in the ion kinetic energy (Ek) range from 4 to 154 eV. Increasing Ek results in film densification and the evolution from a columnar (111) oriented structure at Ek ≤ 24 eV to a fine-grained structure with (100) preferred orientation for Ek ≥ 104 eV. Furthermore, the compressive intrinsic stress increases by 336 % to -4.8 GPa as Ek is increased from 4 to 104 eV. Higher ion kinetic energy causes stress relaxation to -2.7 GPa at 154 eV. These ion irradiation-induced changes in the thin film stress state are in good agreement with density functional theory simulations. Furthermore, the measured elastic moduli of (V,Al)N thin films exhibit no significant dependence on Ek. The apparent independence of the elastic modulus on Ek can be rationalized by considering the concurrent and balancing effects of bombardment-induced formation of Frenkel pairs (causing a decrease in elastic modulus) and evolution of compressive intrinsic stress (causing an increase in elastic modulus). Hence, the evolution of the film stresses and mechanical properties can be understood based on the complex interplay of ion irradiation-induced defect generation and annihilation.
Ämnesord
- NATURVETENSKAP -- Fysik -- Den kondenserade materiens fysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences -- Condensed Matter Physics (hsv//eng)
- NATURVETENSKAP -- Kemi -- Materialkemi (hsv//swe)
- NATURAL SCIENCES -- Chemical Sciences -- Materials Chemistry (hsv//eng)
Nyckelord
- Ion kinetic energy
- Stress state
- Point defects
- Elastic modulus
Publikations- och innehållstyp
- ref (ämneskategori)
- art (ämneskategori)
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