Characterisation of a liquid-xenon jet laser-plasma extreme-ultraviolet source

Hansson, B. A. M.KTH,Fysik,Roy. Inst. of Technology/Albanova, Sweden (författare)

Emmanuelle Janin is the birthname of Emmanuelle Göthelid.
QC 20100525, QC 20111011
A liquid-xenon-jet laser-plasma source for extreme-ultraviolet (EUV) and soft-x-ray generation has been characterized. Being a source candidate for EUV lithography (EUVL), we especially focus on parameters important for the integration of the source in EUVL systems. The deep-ultraviolet (DUV) out-of-band radiation (=120–400 nm) was quantified, to within a factor of two, using a flying-circus tool together with a transmission-grating spectrograph resulting in a total DUV conversion efficiency (CE) of ~0.33%/2sr. The size and the shape of the xenon plasma was investigated using an in-band-only EUV microscope, based on a spherical Mo/Si multilayer mirror and a charge-coupled device detector. Scalability of the source size from 20–270 µm full width at half maximum was shown. The maximum repetition-rate sustainable by the liquid-xenon-jet target was simulated by a double-pulse experiment indicating feasibility of >17 kHz operation. The xenon-ion energy distribution from the plasma was determined in a time-of-flight experiment with a Faraday-cup detector showing the presence of multi-kilo-electron-volt ions. Sputtering of silicon witness plates exposed to the plasma was observed, while a xenon background of >1 mbar was shown to eliminate the sputtering. It is concluded that the source has potential to meet the requirements of future EUVL systems.

Hemberg, O.KTH,Fysik,Roy. Inst. of Technology/Albanova, Sweden(Swepub:kth)u16lyvg0 (författare)
Hertz, Hans M.KTH,Fysik,Roy. Inst. of Technology/Albanova, Sweden(Swepub:kth)u10uiefj (författare)
Berglund, MagnusRoy. Inst. of Technology/Albanova, Sweden (författare)
Choi, H. J.KTH,Fysik,Roy. Inst. of Technology/Albanova, Sweden(Swepub:kth)- (författare)
Jacobsson, BjörnKTH,Fysik,Roy. Inst. of Technology/Albanova, Sweden(Swepub:kth)u1bulnxl (författare)
Janin, E.KTH,Fysik,Roy. Inst. of Technology/Albanova, Sweden(Swepub:kth)- (författare)
Mosesson, SofiaKTH,Fysik,Roy. Inst. of Technology/Albanova, Sweden(Swepub:kth)u1xrkwkm (författare)
Rymell, L.KTH,Fysik,Roy. Inst. of Technology/Albanova, Sweden(Swepub:kth)- (författare)
Thoresen, J.KTH,Fysik,Roy. Inst. of Technology/Albanova, Sweden(Swepub:kth)- (författare)
Wilner, M.KTH,Fysik,Roy. Inst. of Technology/Albanova, Sweden(Swepub:kth)- (författare)
KTHFysik (creator_code:org_t)

Ingår i:Review of Scientific Instruments: AIP Publishing75:6, s. 2122-21290034-67481089-7623

Av författaren/redakt...: Hansson, B. A. M ...; Hemberg, O.; Hertz, Hans M.; Berglund, Magnus; Choi, H. J.; Jacobsson, Björn; visa fler...; Janin, E.; Mosesson, Sofia; Rymell, L.; Thoresen, J.; Wilner, M.; visa färre...

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