WFRF:(Na Wang)
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A Novel Dry Selective Isotropic Atomic Layer Etching of SiGe for Manufacturing Vertical Nanowire Array with Diameter Less than 20 nm
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- Li, Junjie (author)
- Chinese Acad Sci, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China.;Univ Chinese Acad Sci, Microelect Inst, Beijing 100049, Peoples R China.
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- Li, Yongliang (author)
- Chinese Acad Sci, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China.
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- Zhou, Na (author)
- Chinese Acad Sci, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China.
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- Chinese Acad Sci, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China;Univ Chinese Acad Sci, Microelect Inst, Beijing 100049, Peoples R China. Chinese Acad Sci, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China. (creator_code:org_t)
- 2020-02-07
- 2020
- English.
- In: Materials. - : MDPI AG. - 1996-1944. ; 13:3
- Journal article (peer-reviewed)
Abstract
Subject headings
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- Semiconductor nanowires have great application prospects in field effect transistors and sensors. In this study, the process and challenges of manufacturing vertical SiGe/Si nanowire array by using the conventional lithography and novel dry atomic layer etching technology. The final results demonstrate that vertical nanowires with a diameter less than 20 nm can be obtained. The diameter of nanowires is adjustable with an accuracy error less than 0.3 nm. This technology provides a new way for advanced 3D transistors and sensors.
Subject headings
- NATURVETENSKAP -- Fysik -- Den kondenserade materiens fysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences -- Condensed Matter Physics (hsv//eng)
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- ref (subject category)
- art (subject category)
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- Li, Junjie
- Li, Yongliang
- Zhou, Na
- Wang, Guilei
- Zhang, Qingzhu
- Du, Anyan
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- Zhang, Yongkui
- Gao, Jianfeng
- Kong, Zhenzhen
- Lin, Hongxiao
- Xiang, Jinjuan
- Li, Chen
- Yin, Xiaogen
- Li, Yangyang
- Wang, Xiaolei
- Yang, Hong
- Ma, Xueli
- Han, Jianghao
- Zhang, Jing
- Hu, Tairan
- Yang, Tao
- Li, Junfeng
- Yin, Huaxiang
- Zhu, Huilong
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- Radamson, Henry ...
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- Mid Sweden University
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