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- Li, JunjieChinese Acad Sci, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China.;Univ Chinese Acad Sci, Microelect Inst, Beijing 100049, Peoples R China. (författare)
A Novel Dry Selective Isotropic Atomic Layer Etching of SiGe for Manufacturing Vertical Nanowire Array with Diameter Less than 20 nm
- Artikel/kapitelEngelska2020
Förlag, utgivningsår, omfång ...
- 2020-02-07
- MDPI AG,2020
- electronicrdacarrier
Nummerbeteckningar
- LIBRIS-ID:oai:DiVA.org:miun-38982
- https://urn.kb.se/resolve?urn=urn:nbn:se:miun:diva-38982URI
- https://doi.org/10.3390/ma13030771DOI
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- Språk:engelska
- Sammanfattning på:engelska
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- Semiconductor nanowires have great application prospects in field effect transistors and sensors. In this study, the process and challenges of manufacturing vertical SiGe/Si nanowire array by using the conventional lithography and novel dry atomic layer etching technology. The final results demonstrate that vertical nanowires with a diameter less than 20 nm can be obtained. The diameter of nanowires is adjustable with an accuracy error less than 0.3 nm. This technology provides a new way for advanced 3D transistors and sensors.
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Biuppslag (personer, institutioner, konferenser, titlar ...)
- Li, YongliangChinese Acad Sci, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China. (författare)
- Zhou, NaChinese Acad Sci, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China. (författare)
- Wang, GuileiChinese Acad Sci, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China.;Univ Chinese Acad Sci, Microelect Inst, Beijing 100049, Peoples R China. (författare)
- Zhang, QingzhuChinese Acad Sci, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China.;Gen Res Inst Nonferrous Met, State Key Lab Adv Mat Smart Sensing, Beijing 100088, Peoples R China. (författare)
- Du, AnyanChinese Acad Sci, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China. (författare)
- Zhang, YongkuiChinese Acad Sci, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China. (författare)
- Gao, JianfengChinese Acad Sci, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China. (författare)
- Kong, ZhenzhenChinese Acad Sci, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China. (författare)
- Lin, HongxiaoChinese Acad Sci, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China. (författare)
- Xiang, JinjuanChinese Acad Sci, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China. (författare)
- Li, ChenChinese Acad Sci, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China.;Univ Chinese Acad Sci, Microelect Inst, Beijing 100049, Peoples R China. (författare)
- Yin, XiaogenChinese Acad Sci, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China.;Univ Chinese Acad Sci, Microelect Inst, Beijing 100049, Peoples R China. (författare)
- Li, YangyangChinese Acad Sci, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China.;Univ Chinese Acad Sci, Microelect Inst, Beijing 100049, Peoples R China. (författare)
- Wang, XiaoleiChinese Acad Sci, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China. (författare)
- Yang, HongChinese Acad Sci, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China. (författare)
- Ma, XueliChinese Acad Sci, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China. (författare)
- Han, JianghaoChinese Acad Sci, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China. (författare)
- Zhang, JingNorth China Univ Technol, Coll Elect & Informat Engn, Beijing 100144, Peoples R China. (författare)
- Hu, TairanNorth China Univ Technol, Coll Elect & Informat Engn, Beijing 100144, Peoples R China. (författare)
- Yang, TaoChinese Acad Sci, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China. (författare)
- Li, JunfengChinese Acad Sci, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China. (författare)
- Yin, HuaxiangChinese Acad Sci, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China.;Univ Chinese Acad Sci, Microelect Inst, Beijing 100049, Peoples R China. (författare)
- Zhu, HuilongChinese Acad Sci, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China.;Univ Chinese Acad Sci, Microelect Inst, Beijing 100049, Peoples R China. (författare)
- Wang, WenwuChinese Acad Sci, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China.;Univ Chinese Acad Sci, Microelect Inst, Beijing 100049, Peoples R China. (författare)
- Radamson, Henry H.Mittuniversitetet,Institutionen för elektronikkonstruktion,Chinese Acad Sci, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China.;Univ Chinese Acad Sci, Microelect Inst, Beijing 100049, Peoples R China(Swepub:miun)henrad (författare)
- Chinese Acad Sci, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China.;Univ Chinese Acad Sci, Microelect Inst, Beijing 100049, Peoples R China.Chinese Acad Sci, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China. (creator_code:org_t)
Sammanhörande titlar
- Ingår i:Materials: MDPI AG13:31996-1944
Internetlänk
- https://doi.org/10.3390/ma13030771Fulltext
- https://miun.diva-portal.org/smash/get/diva2:1427966/FULLTEXT01.pdffulltext:print
- https://res.mdpi.com/d_attachment/materials/materials-13-00771/article_deploy/materials-13-00771-v2.pdf
- https://urn.kb.se/resolve?urn=urn:nbn:se:miun:diva-38982
- https://doi.org/10.3390/ma13030771
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