Design of a Micromachined Thermopile Infrared Sensor with a Self-Supported SiO2/SU-8 Membrane

↓ Direkt till sidans innehåll
↓ Direkt till sidans sekundära innehåll (sidomenyn)

Search: WFRF:(Mattsson Claes 1978 ) > (2005-2009) > Design of a Microma...

Details
MARC

Mattsson, Claes,1978-Mittuniversitetet,Institutionen för informationsteknologi och medier (-2013),Electronics design division, STC (author)

Design of a Micromachined Thermopile Infrared Sensor with a Self-Supported SiO2/SU-8 Membrane

Article/chapterEnglish2008

Publisher, publication year, extent ...

Piscataway, USA :IEEE,2008
printrdacarrier

Numbers

LIBRIS-ID:oai:DiVA.org:miun-6971
https://urn.kb.se/resolve?urn=urn:nbn:se:miun:diva-6971URI
https://doi.org/10.1109/JSEN.2008.2007679DOI

Supplementary language notes

Language:English
Summary in:English

Part of subdatabase

SwePubSwePub

Classification

Subject category:ref swepub-contenttype
Subject category:art swepub-publicationtype

Notes

VR-Ecology
In the infrared region of the spectrum thermoelectric detectors such as the thermopile, are extensively used. These detectors rely on the well-known Seebeck effect, in which there is a direct conversion of thermoelectric differentials into electrical voltage. The temperature difference over thermocouple junctions is in general, created by forming a thin membrane connected to the silicon bulk. In many existing thermopiles, materials such as Si and Si3N4 have been used as membrane. These materials suffer from relatively high thermal conductivity, which lowers the membrane temperature and reduces the sensitivity of the detector. A material such as SU-8 2002 has a much lower thermal conductivity and is applied using standard photolithographic processing steps. This work presents thermal simulations regarding the use of SU-8 2002 as a thermal insulating membrane as compared to Si and Si3N4. The simulation results presented show that the temperature increase in a 5 µm SiO2/SU-8 membrane is about 9% higher than in a 1 µm Si3N4 membrane, despite the membrane thickness being increased by a factor of 5. A thermopile consisting of 196 serially interconnected Ti/Ni thermocouples positioned on a 5 µm SiO2/SU-8 2002 membrane has been fabricated. The sensitivity of the fabricated device has been evaluated in the infrared region, using a 1.56 µm IR laser and a xenon arc lamp together with a monochromator. The measurement results show a sensitivity of approximately 5 V/W over the wavelength range between 900 - 2200 nm. Measurements performed in a vacuum chamber show that the sensitivity of the detector could be increased by more than a factor of 3 by mounting the detector in a vacuum sealed capsule.

Subject headings and genre

TEKNIK OCH TEKNOLOGIER Elektroteknik och elektronik Annan elektroteknik och elektronik hsv//swe
ENGINEERING AND TECHNOLOGY Electrical Engineering, Electronic Engineering, Information Engineering Other Electrical Engineering, Electronic Engineering, Information Engineering hsv//eng
Infrared sensor
self-supported membrane
SU-8
thermopile
Electronics
Elektronik

Added entries (persons, corporate bodies, meetings, titles ...)

Thungström, GöranMittuniversitetet,Institutionen för informationsteknologi och medier (-2013),Electronics design division(Swepub:miun)gorthu (author)
Bertilsson, KentMittuniversitetet,Institutionen för informationsteknologi och medier (-2013),Electronics design division(Swepub:miun)kenber (author)
Nilsson, Hans-ErikMittuniversitetet,Institutionen för informationsteknologi och medier (-2013),Electronics design division(Swepub:miun)hannil (author)
Martin, HansSenseAir AB (author)
MittuniversitetetInstitutionen för informationsteknologi och medier (-2013) (creator_code:org_t)

Related titles

In:IEEE Sensors JournalPiscataway, USA : IEEE8:12, s. 2044-20521530-437X1558-1748

Internet link

Find in a library

IEEE Sensors Journal (Search for host publication in LIBRIS)

To the university's database

Find more in SwePub

By the author/editor: Mattsson, Claes, ...; Thungström, Göra ...; Bertilsson, Kent; Nilsson, Hans-Er ...; Martin, Hans

About the subject

ENGINEERING AND TECHNOLOGY: ENGINEERING AND ...; and Electrical Engin ...; and Other Electrical ...

Articles in the publication: IEEE Sensors Jou ...

By the university: Mid Sweden University

Search outside SwePub

Extend your search to:: Google; Google Book Search; Google Scholar

Kungliga biblioteket hanterar dina personuppgifter i enlighet med EU:s dataskyddsförordning (2018), GDPR. Läs mer om hur det funkar här.
Så här hanterar KB dina uppgifter vid användning av denna tjänst.

LIBRIS.kb.se