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Fabrication and cha...
Fabrication and characterization of a design optimized SU-8 thermopile with enhanced sensitivity
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- Mattsson, Claes, 1978- (författare)
- Mittuniversitetet,Institutionen för informationsteknologi och medier (-2013),Electronics design division, STC
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- Thungström, Göran (författare)
- Mittuniversitetet,Institutionen för informationsteknologi och medier (-2013),Electronics design division
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- Bertilsson, Kent (författare)
- Mittuniversitetet,Institutionen för informationsteknologi och medier (-2013),Electronics design division
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- Nilsson, Hans-Erik (författare)
- Mittuniversitetet,Institutionen för informationsteknologi och medier (-2013),Electronics design division
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- Martin, Hans (författare)
- SenseAir
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(creator_code:org_t)
- 2009-10-09
- 2009
- Engelska.
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Ingår i: Measurement science and technology. - : IOP. - 0957-0233 .- 1361-6501. ; 20:11, s. 115202-
- Relaterad länk:
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https://urn.kb.se/re...
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https://doi.org/10.1...
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Abstract
Ämnesord
Stäng
- In the infrared wavelength region, thermopiles are an important type of detectors. A major advantage of thermopiles is their non-cooling requirement. Depending on the applied absorption layer, their responsivity is often rather flat within a large wavelength region. This work presents the fabrication and characterization of a sensitivity and design optimized thermopile detector with a 4 µm self-supported SiO2/SU-8 membrane. The structure consists of 240 series interconnected thermocouple junctions obtained by a metal evaporation and lift-off. Two metal combinations have been evaluated, namely, nickel/titanium and aluminium/bismuth. Series resistances of 76 k and 283 k were measured for the Ni/Ti thermopile and the Al/Bi thermopile respectively. For the Al/Bi thermopile a responsivity of 60 V/W was achieved using a 1.56 µm fibre coupled diode laser with a power of 3.5 mW. Using a white light source with a radiation flux of 0.45 W/mm2 a voltage response of 68 V mm2/W was measured for the Al/Bi thermopile. The time constant of the characterized detectors was calculated as being 70 ms, using the pulsed IR laser.
Ämnesord
- TEKNIK OCH TEKNOLOGIER -- Elektroteknik och elektronik -- Annan elektroteknik och elektronik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Electrical Engineering, Electronic Engineering, Information Engineering -- Other Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)
Nyckelord
- Fabrication
- Thermopile
- SU-8
- Electronics
- Elektronik
Publikations- och innehållstyp
- ref (ämneskategori)
- art (ämneskategori)
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