WFRF:(Vittoz S.)
Search: WFRF:(Vittoz S.) > Modelling and optim...
- 5 of 10
- Previous record
- Next record
- To hitlist
- Edwards, MichaelUniversity of Bath (author)
Modelling and optimisation of a sapphire/GaN-based diaphragm structure for pressure sensing in harsh environments
- Article/chapterEnglish2010
Publisher, publication year, extent ...
- 2010
- printrdacarrier
Numbers
- LIBRIS-ID:oai:DiVA.org:ri-13432
- https://urn.kb.se/resolve?urn=urn:nbn:se:ri:diva-13432URI
- https://doi.org/10.1109/ASDAM.2010.5666320DOI
Supplementary language notes
- Language:English
- Summary in:English
Part of subdatabase
- SwePubSwePub
Classification
Notes
- GaN is a potential sensor material for harsh environments due to its piezoelectric and mechanical properties. In this paper an 8mm diameter sensor structure is proposed based on a GaN / AlGaN / sapphire HEMT wafer. The discs will be glass-bonded to an alumina package, creating a 'drumskin' type sensor that is sensitive to pressure changes. The electromechanical behaviour of the sensor is studied in an attempt to optimise the design of a pressure sensor (HEMT position and sapphire thickness) for operation in the range of 10 - 50 bar (5 MPa) and above 300°C. ©2010 IEEE.
Subject headings and genre
Added entries (persons, corporate bodies, meetings, titles ...)
- Vittoz, S.CNRS (author)
- Amen, RafaelRISE,IVF (author)
- Rufer, L.CNRS (author)
- Johander, PerRISE,IVF (author)
- Bowen, C.R.University of Bath (author)
- University of BathCNRS (creator_code:org_t)
Related titles
- In:Conference Proceedings - The 8th International Conference on Advanced Semiconductor Devices and Microsystems, ASDAM 2010, s. 127-1309781424485758
Internet link
Find in a library
- Conference Proceedings - The 8th International Conference on Advanced Semiconduc... (Search for host publication in LIBRIS)
To the university's database
- 5 of 10
- Previous record
- Next record
- To hitlist
Find more in SwePub
- By the author/editor
- Edwards, Michael
- Vittoz, S.
- Amen, Rafael
- Rufer, L.
- Johander, Per
- Bowen, C.R.
- About the subject
-
- ENGINEERING AND TECHNOLOGY
- ENGINEERING AND ...
- and Materials Engine ...
- Articles in the publication
- Conference Proce ...
- By the university
- RISE
Search outside SwePub
- Extend your search to:
- Google Book Search
- Google Scholar
Kungliga biblioteket hanterar dina personuppgifter i enlighet med EU:s dataskyddsförordning (2018), GDPR. Läs mer om hur det funkar här.
Så här hanterar KB dina uppgifter vid användning av denna tjänst.
- Copyright © LIBRIS - National Library Systems
- LIBRIS.kb.se
