Progress in buried grid technology for improvements in on-resistance of high voltage SiC devices

• Buried grid technology is suggested to protect field sensitive device areas from high electric field in order to improve the high temperature and high voltage performance of SiC devices. More than three orders of magnitude lower leakage currents have been demonstrated at high temperature operation. The drawback is that the total resistance increases due to the introduction of the buried grid leading to higher voltage drop at rated current and higher conduction losses. In this paper, we discuss doping and barrier engineering methods in order to take full advantage of the superior shielding effect of the buried grid technology and at the same time minimize the effect on the current conduction. As example, the design considerations for a 1200 V SiC buried grid JBS diode in terms of epi structure doping as well as buried grid properties is comprehensively investigated to optimize the on-state condition.

Ämnesord

NATURVETENSKAP  -- Data- och informationsvetenskap (hsv//swe)

NATURAL SCIENCES  -- Computer and Information Sciences (hsv//eng)

Nyckelord

Electric fields

Gallium nitride

High temperature operations

Leakage currents

Nitrides

Semiconductor junctions

Barrier engineering

Current conduction

Design considerations

Field sensitives

Grid technologies

High electric fields

Three orders of magnitude

Total resistance

Silicon carbide

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