A micromachined coupled-cantilever for piezoelectric energy harvesters

• This paper presents a demonstration of the feasibility of fabricating micro-cantilever harvesters with extended stress distribution and enhanced bandwidth by exploiting an M-shaped two-degrees-of-freedom design. The measured mechanical response of the fabricated device displays the predicted dual resonance peak behavior with the fundamental peak at the intended frequency. This design has the features of high energy conversion efficiency in a miniaturized environment where the available vibrational energy varies in frequency. It makes such a design suitable for future large volume production of integrated self powered sensors nodes for the Internet-of-Things

Ämnesord

NATURVETENSKAP  -- Data- och informationsvetenskap -- Datorteknik (hsv//swe)

NATURAL SCIENCES  -- Computer and Information Sciences -- Computer Engineering (hsv//eng)

TEKNIK OCH TEKNOLOGIER  -- Elektroteknik och elektronik -- Inbäddad systemteknik (hsv//swe)

ENGINEERING AND TECHNOLOGY  -- Electrical Engineering, Electronic Engineering, Information Engineering -- Embedded Systems (hsv//eng)

TEKNIK OCH TEKNOLOGIER  -- Elektroteknik och elektronik -- Annan elektroteknik och elektronik (hsv//swe)

ENGINEERING AND TECHNOLOGY  -- Electrical Engineering, Electronic Engineering, Information Engineering -- Other Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)

TEKNIK OCH TEKNOLOGIER  -- Elektroteknik och elektronik (hsv//swe)

ENGINEERING AND TECHNOLOGY  -- Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)

Nyckelord

Bandwidth broadening

Coupled cantilevers

Enhanced stress distribution

Finite element modeling

Lead zirconate titanate

Microelectromechanical systems (MEMS)

Piezoelectric micro-energy harvester

Bandwidth

Conversion efficiency

Degrees of freedom (mechanics)

Display devices

Electromechanical devices

Energy harvesting

Finite element method

MEMS

Piezoelectricity

Stress concentration

High energy conversions

Micro electromechanical system (MEMS)

Micro energy

Piezoelectric energy harvesters

Two degrees of freedom

Vibrational energies

Nanocantilevers

Publikations- och innehållstyp

ref (ämneskategori)

art (ämneskategori)