Sökning: WFRF:(Samel S) >
CMOS-integrated Si/...
CMOS-integrated Si/SiGe quantum-well infrared microbolometer focal plane arrays manufactured with very large-scale heterogeneous 3-d integration
-
- Forsberg, Fredrik (författare)
- KTH,Mikro- och nanosystemteknik,KTH Royal Institute of Technology, Sweden
-
- Lapadatu, A. (författare)
- Sensonor AS, Norway
-
- Kittilsland, G. (författare)
- Sensonor AS, Norway
-
visa fler...
-
- Martinsen, S. (författare)
- Sensonor AS, Norway
-
- Roxhed, Niclas (författare)
- KTH,Mikro- och nanosystemteknik,KTH Royal Institute of Technology, Sweden
-
- Fischer, A. C. (författare)
- KTH Royal Institute of Technology, Sweden
-
- Stemme, G. (författare)
- KTH Royal Institute of Technology, Sweden
-
- Samel, Björn (författare)
- RISE,Acreo
-
- Ericsson, Peter (författare)
- RISE,Acreo
-
- Hoivik, N. (författare)
- Vestfold University College, Norway
-
- Bakke, T. (författare)
- SINTEF, Norway
-
- Bring, M. (författare)
- Sensonor AS, Norway
-
- Kvisteroy, T. (författare)
- Sensonor AS, Norway
-
- Ror, A. (författare)
- Sensonor AS, Norway
-
- Niklaus, Frank (författare)
- KTH,Mikro- och nanosystemteknik
-
Ericsson, Per (författare)
-
visa färre...
-
(creator_code:org_t)
- Institute of Electrical and Electronics Engineers Inc. 2015
- 2015
- Engelska.
-
Ingår i: IEEE Journal of Selected Topics in Quantum Electronics. - : Institute of Electrical and Electronics Engineers Inc.. - 0792-1233 .- 1077-260X .- 1558-4542. ; 21:4
- Relaterad länk:
-
https://doi.org/10.1...
-
visa fler...
-
https://kth.diva-por... (primary) (Raw object)
-
https://urn.kb.se/re...
-
https://doi.org/10.1...
-
https://urn.kb.se/re...
-
visa färre...
Abstract
Ämnesord
Stäng
- We demonstrate infrared focal plane arrays utilizing monocrystalline silicon/silicon-germanium (Si/SiGe) quantum-well microbolometers that are heterogeneously integrated on top of CMOS-based electronic read-out integrated circuit substrates. The microbolometers are designed to detect light in the long wavelength infrared (LWIR) range from 8 to 14 μm and are arranged in focal plane arrays consisting of 384 × 288 microbolometer pixels with a pixel pitch of 25 μm × 25 μm. Focal plane arrays with two different microbolometer designs have been implemented. The first is a conventional single-layer microbolometer design and the second is an umbrella design in which the microbolometer legs are placed underneath the microbolometer membrane to achieve an improved pixel fill-factor. The infrared focal plane arrays are vacuum packaged using a CMOS compatible wafer bonding and sealing process. The demonstrated heterogeneous 3-D integration and packaging processes are implemented at wafer-level and enable independent optimization of the CMOS-based integrated circuits and the microbolometer materials. All manufacturing is done using standard semiconductor and MEMS processes, thus offering a generic approach for integrating CMOS-electronics with complex miniaturized transducer elements
Ämnesord
- NATURVETENSKAP -- Fysik -- Annan fysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences -- Other Physics Topics (hsv//eng)
Nyckelord
- Long-wavelength infrared imaging
- LWIR
- MEMS
- Si/SiGe quantum-wells
- wafer-level vacuum packaging
- thermal imaging
- uncooled microbolometer
- very large-scale heterogeneous 3-D integration
- Bolometers
- Chip scale packages
- CMOS integrated circuits
- Focal plane arrays
- Focusing
- Infrared detectors
- Infrared devices
- Infrared imaging
- Infrared radiation
- Integrated circuit design
- Monocrystalline silicon
- Pixels
- Semiconductor quantum wells
- Silicon wafers
- Substrates
- Temperature sensors
- Thermography (imaging)
- Three dimensional integrated circuits
- VLSI circuits
- Wafer bonding
- 3-D integration
- Long-wavelength infrared
- Uncooled microbolometers
- Wafer level vacuum packaging
- MOEMS
Publikations- och innehållstyp
- ref (ämneskategori)
- art (ämneskategori)
Hitta via bibliotek
Till lärosätets databas
- Av författaren/redakt...
-
Forsberg, Fredri ...
-
Lapadatu, A.
-
Kittilsland, G.
-
Martinsen, S.
-
Roxhed, Niclas
-
Fischer, A. C.
-
visa fler...
-
Stemme, G.
-
Samel, Björn
-
Ericsson, Peter
-
Hoivik, N.
-
Bakke, T.
-
Bring, M.
-
Kvisteroy, T.
-
Ror, A.
-
Niklaus, Frank
-
Ericsson, Per
-
visa färre...
- Om ämnet
-
- NATURVETENSKAP
-
NATURVETENSKAP
-
och Fysik
-
och Annan fysik
- Artiklar i publikationen
-
IEEE Journal of ...
- Av lärosätet
-
RISE
-
Kungliga Tekniska Högskolan