Dynamic calibration of higher eigenmode parameters of a cantilever in atomic force microscopy by using tip-surface interactions

• We present a theoretical framework for the dynamic calibration of the higher eigenmode parameters (stiffness and optical lever inverse responsivity) of a cantilever. The method is based on the tip-surface force reconstruction technique and does not require any prior knowledge of the eigenmode shape or the particular form of the tip-surface interaction. The calibration method proposed requires a single-point force measurement by using a multimodal drive and its accuracy is independent of the unknown physical amplitude of a higher eigenmode.

Ämnesord

TEKNIK OCH TEKNOLOGIER  -- Nanoteknik (hsv//swe)

ENGINEERING AND TECHNOLOGY  -- Nano-technology (hsv//eng)

NATURVETENSKAP  -- Fysik (hsv//swe)

NATURAL SCIENCES  -- Physical Sciences (hsv//eng)

Nyckelord

atomic force microscopy

calibration

multimodal AFM

multifrequency AFM

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