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- Surpi, AlessandroUppsala universitet,Institutionen för fysik och materialvetenskap (author)
Focused ion beam fabrication procedures of x-ray micro Fresnel zone plates
- Article/chapterEnglish2007
Publisher, publication year, extent ...
- 2007-02-20
- IOP Publishing,2007
- printrdacarrier
Numbers
- LIBRIS-ID:oai:DiVA.org:uu-10709
- https://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-10709URI
- https://doi.org/10.1088/0960-1317/17/3/026DOI
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- Language:English
- Summary in:English
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Notes
- In this paper the use of focused ion beam (FIB) mask-less lithography is presented as a novel and simple way to fabricate x-ray Fresnel zone plates (FZPs), and a prototype of a FIB-made 100 nm resolution FZP with 38 zones is described. Considerations for future developments—the maximum aspect ratio achievable by FIB lithography in nickel, a way to produce zones with a parabolic transverse profile, as theoretically required for the highest efficiency in focusing—are also reported.
Subject headings and genre
- NATURVETENSKAP Fysik hsv//swe
- NATURAL SCIENCES Physical Sciences hsv//eng
- Physics
- Fysik
Added entries (persons, corporate bodies, meetings, titles ...)
- Valizadeh, SimaUppsala universitet,Tillämpad materialvetenskap(Swepub:uu)sival102 (author)
- Leifer, KlausUppsala universitet,Tillämpad materialvetenskap(Swepub:uu)kllei839 (author)
- Lagomarsino, StefanoIstituto di Fotonica e Nanotecnologie (CNR) Via Cineto Romano 42, 00156 Roma, Italy (author)
- Uppsala universitetInstitutionen för fysik och materialvetenskap (creator_code:org_t)
Related titles
- In:Journal of Micromechanics and Microengineering: IOP Publishing17:3, s. 617-6220960-13171361-6439
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