Micro- and nanostructured magnetic field sensor for space applications

• Magnetometers are popular payloads on scientific space missions. Here, the design and fabrication process of a miniaturized magnetometer based on tunneling magnetoresistance is presented. The process is capable of making magnetic tunnel junctions in a wide size range, by employing both UV lithography and focused ion beam milling and deposition. Ga implantation in the ferromagnetic electrodes of the junction is studied in more detail. It was shown that Ga implantation may harm the magnetometer if the irradiation dose exceeds 1014 Ga+ cm-2.

Subject headings

TEKNIK OCH TEKNOLOGIER  -- Maskinteknik -- Rymd- och flygteknik (hsv//swe)

ENGINEERING AND TECHNOLOGY  -- Mechanical Engineering -- Aerospace Engineering (hsv//eng)

Keyword

aerospace instrumentation ferromagnetic materials focused ion beam technology gallium ion implantation magnetic field measurement magnetic sensors magnetometers microelectrodes microsensors milling sputtered coatings tunnelling magnetoresistance ultraviolet lithography

Space engineering

Rymdteknik

Materialvetenskap

Materials Science

Publication and Content Type

ref (subject category)

kon (subject category)