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The use of swift heavy ions for nanolithography
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- Hjort, Klas (author)
- Uppsala universitet,Mikrosystemteknik
- Jensen, J. (author)
- Sanz, R. (author)
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- Skupinski, M. (author)
- Jonsson, A. (author)
- Boman, M. (author)
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- (creator_code:org_t)
- 2007
- 2007
- English.
- Conference paper (peer-reviewed)
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- kon (subject category)
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- Hjort, Klas
- Jensen, J.
- Sanz, R.
- Skupinski, M.
- Jonsson, A.
- Boman, M.
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- Possnert, Göran
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- Uppsala University
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