Microfluidics integrable plasma source powered by a silicon through-substrate split-ring resonator

• A novel microplasma source, based on a microstrip split-ring resonator design with electrodes integrated in its silicon substrate, was designed, manufactured and evaluated. This device should offer straightforward integration with other MEMS components, and has a plasma discharge gap with a controlled volume and geometry, with potential for microfluidics. Two realized devices were resonant at around 2.9 GHz with quality factors of 26.6 and 18.7. Two different plasma ignition modes were observed, where the plasma at low pressures was not confined to the gap but rather appeared between the ends of the electrodes on the backside.

Ämnesord

NATURVETENSKAP  -- Fysik -- Annan fysik (hsv//swe)

NATURAL SCIENCES  -- Physical Sciences -- Other Physics Topics (hsv//eng)

Nyckelord

elemental semiconductors

ignition

microfluidics

micromechanical resonators

microstrip resonators

plasma instability

plasma pressure

plasma sources;silicon

MEMS

Si

microfluidics integrable plasma source

plasma discharge gap

plasma ignition modes

quality factors

silicon through-substrate split-ring resonator

Electrodes

Microstrip

Nickel

Optical resonators

Plasma sources

Substrates

Micro-fluidics

Microplasma source

Ni plating

RF

Split-ring resonator

Teknisk fysik med inriktning mot mikrosystemteknik

Engineering Science with specialization in Microsystems Technology

Engineering Science with specialization in Microwave Technology

Teknisk fysik med inriktning mot mikrovågsteknik

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vet (ämneskategori)

kon (ämneskategori)