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Nb-B-C thin films f...
Nb-B-C thin films for electrical contact applications deposited by magnetron sputtering
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- Nedfors, Nils (författare)
- Uppsala universitet,Oorganisk kemi,Uppsala University, Sweden
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- Tengstrand, Olof (författare)
- Linköpings universitet,Tunnfilmsfysik,Tekniska högskolan
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- Eklund, Per (författare)
- Linköpings universitet,Tunnfilmsfysik,Tekniska högskolan
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- Hultman, Lars (författare)
- Linköpings universitet,Tunnfilmsfysik,Tekniska högskolan
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- Jansson, Ulf (författare)
- Uppsala universitet,Oorganisk kemi,Uppsala University, Sweden
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(creator_code:org_t)
- American Vacuum Society, 2014
- 2014
- Engelska.
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Ingår i: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. - : American Vacuum Society. - 0734-2101 .- 1520-8559. ; 32:4, s. 041503-
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https://liu.diva-por... (primary) (Raw object)
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https://urn.kb.se/re...
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https://doi.org/10.1...
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https://urn.kb.se/re...
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Abstract
Ämnesord
Stäng
- The high wear resistance, high chemical inertness, and high electrical conductivity of magnetron-sputtered transition metal diborides (MeB2) make them a candidate material for sliding electrical contacts. However, their high hardness makes it difficult to penetrate surface oxides, resulting in a high electrical contact resistance. We have in this study investigated how the contact resistance can be improved by the formation of softer Nb-B-C films. The Nb-B-C films were deposited by magnetron sputtering and shown to exhibit a nanocomposite microstructure consisting of nanocrystalline NbB2-x grains with a solid solution of C separated by an amorphous BCx phase. The formation of the BCx phase reduces the hardness from 41 GPa for the NbB2-x film to 19 GPa at 36 at.% C. As a consequence the contact resistance is drastically reduced and the lowest contact resistance of 35 mΩ (contact force 5 N) is achieved for a film containing 30 at.% C. However, crack formation and subsequent delamination and fragmentation is observed for the C-containing Nb-B-C films in tribology tests resulting in high friction values for these films.
Ämnesord
- NATURVETENSKAP -- Kemi -- Materialkemi (hsv//swe)
- NATURAL SCIENCES -- Chemical Sciences -- Materials Chemistry (hsv//eng)
- NATURVETENSKAP -- Fysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences (hsv//eng)
Nyckelord
- boride
- structural characterization
- electrical properties
- mechanical properties
- friction
- nanocomposite
- Chemistry with specialization in Materials Chemistry
- Kemi med inriktning mot materialkemi
Publikations- och innehållstyp
- ref (ämneskategori)
- art (ämneskategori)
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