WFRF:(Martinsson J)
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- Karlsson, MikaelUppsala universitet,Materialvetenskap (author)
Monolithic integration of continuous-relief diffractive structures with vertical-cavity surface-emitting lasers
- Article/chapterEnglish2003
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- 2003
- printrdacarrier
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- LIBRIS-ID:oai:DiVA.org:uu-220858
- https://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-220858URI
- https://doi.org/10.1109/LPT.2003.807906DOI
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- Language:English
- Summary in:English
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- In this work, we have studied the transfer of diffractive optical elements (DOEs), originally made in resist, into GaAs for monolithic integration with vertical-cavity surface-emitting lasers (VCSELs). The DOEs are blazed gratings and Fresnel lenses, and have been fabricated on the back surface of bottom emitting VCSELs using electron-beam lithography or replication by hot embossing in resist followed by a quick-dry etch step. Diffraction efficiency was measured to be 81% in the first order of diffraction for the blazed grating.
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- Nikolajeff, FredrikUppsala universitet,Materialvetenskap(Swepub:uu)fni28025 (author)
- Vukusic, JChalmers University of Technology, Sweden (author)
- Martinsson, HChalmers University of Technology, Sweden (author)
- Bengtsson, JChalmers University of Technology, Sweden (author)
- Larsson, AChalmers University of Technology, Sweden (author)
- Uppsala universitetMaterialvetenskap (creator_code:org_t)
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- In:IEEE Photonics Technology Letters15:3, s. 359-3611041-11351941-0174
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