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Comparison of Al-Si...
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Lewin, ErikLaboratory for Nanoscale Materials Science, Empa, Dübendorf, Switzerland
(author)
Comparison of Al-Si-N nanocomposite coatings deposited by HIPIMS and DC magnetron sputtering
- Article/chapterEnglish2013
Publisher, publication year, extent ...
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Elsevier BV,2013
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Numbers
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LIBRIS-ID:oai:DiVA.org:uu-232144
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https://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-232144URI
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https://doi.org/10.1016/j.surfcoat.2013.06.076DOI
Supplementary language notes
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Language:English
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Summary in:English
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Subject category:ref swepub-contenttype
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Subject category:art swepub-publicationtype
Notes
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This paper presents a comparative study between DC magnetron sputtering (DCMS) and high power impulse magnetron sputtering (HIPIMS) of Al-Si-N. Coatings were synthesised through co-sputtering of Al and Si in a mixed Ar/N-2. One set of DCMS experiments and one set of hybrid HIPIMS (Al-target)/DCMS (Si-target) experiments were conducted. It was found that a higher partial pressure of N-2 was necessary to obtain fully nitrided material using the HIPIMS process. The Si content of the samples was varied between 0 and 16 at.%. All processes were characterised using optical emission spectroscopy (OES) as well as energy-resolved mass spectrometry (E-MS). The obtained coatings were characterised using X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), scanning electron microscopy (SEM), as well as UV-Vis spectroscopy and nanoindentation. The HIPIMS processes were found to provide a highly activated growth environment, with Al+ comprising 87% of the total ion flux, compared to 0.6% for the DCMS case, where Ar+ was found to be the dominating species comprising 90% of the total ion flux. Coatings from both HIPIMS and DCMS processes were found to form nanocomposites of a solid solution phase (Al1-xSix)N and most likely a SiN, phase, as shown by XRD and XPS analyses. Compared to coatings from DCMS, samples deposited with HIPIMS had a slightly more textured AlN-phase with smaller grains, as well as smoother and, denser morphology as observed by SEM. In agreement with previous studies, the coatings had a high transparency in the visual and near IR range; an optical band gap (E-04) between 4.6 and 5.2 eV and a refractive index between 1.9 and 2.1 was observed. The ternary coatings studied here were found to be hard with the HIPIMS coatings (combined average 22 +/- 3 GPa) being harder than their DCMS counterpart (combined average 17 +/- 1 GPa). A maximum hardness of 27 GPa was observed for the sample deposited with HIPIMS and a Si-content of 7 at.%.
Subject headings and genre
Added entries (persons, corporate bodies, meetings, titles ...)
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Loch, DanielHIPIMS Technology Centre, MERI, Sheffield Hallam University, UK
(author)
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Montagne, AlexMechanics of Materials and Nanostructures, Empa, Thun, Switzerland
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Ehiasarian, Arutiun P.HIPIMS Technology Centre, MERI, Sheffield Hallam University, UK
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Patscheider, JoergLaboratory for Nanoscale Materials Science, Empa, Dübendorf, Switzerland
(author)
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Laboratory for Nanoscale Materials Science, Empa, Dübendorf, SwitzerlandHIPIMS Technology Centre, MERI, Sheffield Hallam University, UK
(creator_code:org_t)
Related titles
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In:Surface & Coatings Technology: Elsevier BV232, s. 680-6890257-89721879-3347
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