L773:0042 207X
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Initial etching in an RF butane plasma
- Andersson, LP (author)
-
- Berg, Sören (author)
- Uppsala universitet,Fasta tillståndets elektronik
- (creator_code:org_t)
- 1978
- 1978
- English.
- In: Vacuum. - 0042-207X .- 1879-2715. ; 28, s. 449-
- Journal article (peer-reviewed)
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