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  • Berg, SörenUppsala universitet,Fasta tillståndets elektronik (author)

Modelling of reactive sputtering of compound materials

  • Article/chapterEnglish1987

Publisher, publication year, extent ...

  • 1987
  • printrdacarrier

Numbers

  • LIBRIS-ID:oai:DiVA.org:uu-258250
  • https://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-258250URI

Supplementary language notes

  • Language:English

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  • Subject category:ref swepub-contenttype
  • Subject category:art swepub-publicationtype

Added entries (persons, corporate bodies, meetings, titles ...)

  • Blom, Hans-Olof (author)
  • Larsson, T (author)
  • Nender, C (author)
  • Uppsala universitetFasta tillståndets elektronik (creator_code:org_t)

Related titles

  • In:Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films5:2, s. 202-0734-21011520-8559

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Berg, Sören
Blom, Hans-Olof
Larsson, T
Nender, C
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Uppsala University

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