L773:1520 8559 OR L773:0734 2101
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Properties of titanium boride films prepared by reactive sputtering
- Blom, Hans-Olof (author)
- Larsson, T (author)
-
- Berg, Sören (author)
- Uppsala universitet,Fasta tillståndets elektronik
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- Östling, M (author)
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- (creator_code:org_t)
- 1988
- 1988
- English.
- In: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. - 0734-2101 .- 1520-8559. ; 6:3, s. 1693-
- Journal article (peer-reviewed)
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- art (subject category)
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