Self-heating Effect on Tin Oxide Nanowire Network  Gas Sensor

• Self-heated gas sensors have attracted much of interests owing to the ultra-low power consumption as well as simple device fabrication. However, it still requires further improvement to overcome some technical difficulties such as high operation voltage, long-term stability, and mass production. In this work, we  propose a nanowire nework structure to solve these problems. The self-heating effect on fabricated structures was  tested and working temperature was evaluated by base resistance measurement and infrared emission microscopy methods. The fabricated sensor consumed an electric power of about 40 mW to reach the working temperature up to 250 oC.  The NO2 sensing properties were initially studied on this sensor structure.

Subject headings

NATURVETENSKAP  -- Annan naturvetenskap (hsv//swe)

NATURAL SCIENCES  -- Other Natural Sciences (hsv//eng)

Keyword

self-heating

gas sensor

ultra-low power

Teknisk fysik med inriktning mot mikrosystemteknik

Engineering Science with specialization in Microsystems Technology

Publication and Content Type

vet (subject category)

kon (subject category)