Self-heating Effect on Tin Oxide Nanowire Network  Gas Sensor

Self-heated gas sensors have attracted much of interests owing to the ultra-low power consumption as well as simple device fabrication. However, it still requires further improvement to overcome some technical difficulties such as high operation voltage, long-term stability, and mass production. In this work, we propose a nanowire nework structure to solve these problems. The self-heating effect on fabricated structures was tested and working temperature was evaluated by base resistance measurement and infrared emission microscopy methods. The fabricated sensor consumed an electric power of about 40 mW to reach the working temperature up to 250 oC. The NO2 sensing properties were initially studied on this sensor structure.

Tong Van, KhoaHanoi University of Science and Technology,ITMS (author)
Hoang Thi, ThuyHanoi University of Science and Technology,ITIMS (author)
Nguyen, Hugo,1955-Uppsala universitet,Mikrosystemteknik(Swepub:uu)hugonguy (author)
Duy, Nguyen VanHanoi University of Science and Technology,ITIMS (author)
Hieu, Nguyen VanHanoi University of Science and Technology,ITIMS (author)
Hanoi University of Science and TechnologyITIMS (creator_code:org_t)

By the author/editor: Tan, Ha Minh, 19 ...; Tong Van, Khoa; Hoang Thi, Thuy; Nguyen, Hugo, 19 ...; Duy, Nguyen Van; Hieu, Nguyen Van

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