High-sensitivity surface micromachined structures for internal stress and stress gradient evaluation

• The internal stress and stress gradient of thick (10 mu m) and thin (2 mu m) polysilicon films were evaluated with surface micromachined test structures. The structure that measured internal stress consisted of actuator beams rotating an indicator through

Nyckelord

POLYSILICON; FILMS

Publikations- och innehållstyp

vet (ämneskategori)

art (ämneskategori)