Micromachined near-field millimeter-wave medical sensor for skin cancer diagnosis

• This paper presents the recent achievements in a project on micromachined millimeter-wave near-field medical sensors, in particular for skin cancer diagnosis. Micromachining enables sensor probes which achieve both hig sensitivity and high lateral resolution through a drastically miniaturized probe tip. Two different design strategies are investigated: a broad-band, non-resonating, tapered dielectric-rod probe, and a resonance slot sensor. For probe characterization micromachined silicon test and calibration samples with tailor-made permittivity were fabricated. Characterization of fabricated prototypes show that the tapered probe can clearly and reproducibly distinguish .....

Nyckelord

Calibration samples

Design strategies

Dielectric rods

High sensitivity

High-lateral resolurion

Micromachined silicon

Phantom materials

Simulated response

Engineering Science with specialization in Electronics

Teknisk fysik med inriktning mot elektronik

Publikations- och innehållstyp

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