Fabrication of Suspended All-Metal Sensor Elements in Ceramic Laminates

• To target a wide range of high-temperature applications [1-4], the Ångström Space Technology Centre has added High-Temperature Co-fired Ceramics, HTTC, technology to its repertoire. Usually, this technology follows a processing scheme where thin sheets of green-body ceramics are metallized through screen printing and structured by embossing, punching or milling, before they are laminated and sintered to form components. A limitation with this, is the difficulty of realizing freely suspended metal structures, which is a disadvantage in, e.g., the fabrication of calorimetric sensors or electric field probes. In this work, the embedding of platinum wires in HTCC is explored experimentally, and demonstrated for use in pressure and plasma I-V sensing.

Nyckelord

Microsensors

Bond WIre

Harsh Environments

High Temperatures

Ceramic Systems

Engineering Science with specialization in Microwave Technology

Teknisk fysik med inriktning mot mikrovågsteknik

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