Understanding the microwave annealing of silicon

Sökning: WFRF:(Shi Yue) > Understanding the m...

Fu, ChaochaoFudan Univ, State Key Lab ASIC & Syst, Shanghai 200433, Peoples R China. (författare)

Though microwave annealing appears to be very appealing due to its unique features, lacking an in-depth understanding and accurate model hinder its application in semiconductor processing. In this paper, the physics-based model and accurate calculation for the microwave annealing of silicon are presented. Both thermal effects, including ohmic conduction loss and dielectric polarization loss, and non-thermal effects are thoroughly analyzed. We designed unique experiments to verify the mechanism and extract relevant parameters. We also explicitly illustrate the dynamic interaction processes of the microwave annealing of silicon. This work provides an in-depth understanding that can expedite the application of microwave annealing in semiconductor processing and open the door to implementing microwave annealing for future research and applications.

Wang, YanFudan Univ, State Key Lab ASIC & Syst, Shanghai 200433, Peoples R China. (författare)
Xu, PengFudan Univ, State Key Lab ASIC & Syst, Shanghai 200433, Peoples R China. (författare)
Yue, LeiFudan Univ, State Key Lab ASIC & Syst, Shanghai 200433, Peoples R China. (författare)
Sun, FengFudan Univ, State Key Lab ASIC & Syst, Shanghai 200433, Peoples R China. (författare)
Zhang, David WeiFudan Univ, State Key Lab ASIC & Syst, Shanghai 200433, Peoples R China. (författare)
Zhang, Shi-LiUppsala universitet,Fasta tillståndets elektronik(Swepub:uu)shizh725 (författare)
Luo, JunChinese Acad Sci, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China. (författare)
Zhao, ChaoChinese Acad Sci, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China. (författare)
Wu, DongpingFudan Univ, State Key Lab ASIC & Syst, Shanghai 200433, Peoples R China. (författare)
Fudan Univ, State Key Lab ASIC & Syst, Shanghai 200433, Peoples R China.Fasta tillståndets elektronik (creator_code:org_t)

Av författaren/redakt...: Fu, Chaochao; Wang, Yan; Xu, Peng; Yue, Lei; Sun, Feng; Zhang, David Wei; visa fler...; Zhang, Shi-Li; Luo, Jun; Zhao, Chao; Wu, Dongping; visa färre...

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