Unprecedented thermal stability of inherently metastable titanium aluminum nitride by point defect engineering

Baben, Moritz toRhein Westfal TH Aachen, Mat Chem, D-52074 Aachen, Germany.;GTT Technol, Herzogenrath, Germany. (författare)

Extreme cooling rates during physical vapor deposition (PVD) allow growth of metastable phases. However, we propose that reactive PVD processes can be described by a gas-solid paraequilibrium defining chemical composition and thus point defect concentration. Weshow that this notion allows for point defect engineering by controlling deposition conditions. As example we demonstrate that thermal stability of metastable (Ti, Al) Nx, the industrial benchmark coating for wear protection, can be increased from 800 degrees C to unprecedented 1200 degrees C by minimizing the vacancy concentration. The thermodynamic approach formulated here opens a pathway for thermal stability engineering by point defects in reactively deposited thin films.

Hans, MarcusRhein Westfal TH Aachen, Mat Chem, D-52074 Aachen, Germany. (författare)
Primetzhofer, DanielUppsala universitet,Tillämpad kärnfysik(Swepub:uu)danpr521 (författare)
Evertz, SimonRhein Westfal TH Aachen, Mat Chem, D-52074 Aachen, Germany. (författare)
Ruess, HolgerRhein Westfal TH Aachen, Mat Chem, D-52074 Aachen, Germany. (författare)
Schneider, Jochen M.Rhein Westfal TH Aachen, Mat Chem, D-52074 Aachen, Germany. (författare)
Rhein Westfal TH Aachen, Mat Chem, D-52074 Aachen, Germany.;GTT Technol, Herzogenrath, Germany.Rhein Westfal TH Aachen, Mat Chem, D-52074 Aachen, Germany. (creator_code:org_t)

Ingår i:Materials Research Letters: TAYLOR & FRANCIS INC5:3, s. 158-1692166-3831

Av författaren/redakt...: Baben, Moritz to; Hans, Marcus; Primetzhofer, Da ...; Evertz, Simon; Ruess, Holger; Schneider, Joche ...

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