WFRF:(Ottosson Mikael)
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Laser-Assisted ALD of BN Thin Films
- Olander, Jenny (author)
- Ottosson, Mikael (author)
- Hezler, Peter (author)
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- (creator_code:org_t)
- 2003
- 2003
- English.
- In: Thin Solid Films. - 0040-6090 .- 1879-2731.
- Journal article (peer-reviewed)
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Subject headings
- NATURVETENSKAP -- Kemi -- Oorganisk kemi (hsv//swe)
- NATURAL SCIENCES -- Chemical Sciences -- Inorganic Chemistry (hsv//eng)
Publication and Content Type
- ref (subject category)
- art (subject category)
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- Olander, Jenny
- Ottosson, Mikael
- Hezler, Peter
- Carlsson, Jan-Ot ...
- Larsson, Karin, ...
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- NATURAL SCIENCES
- NATURAL SCIENCES
- and Chemical Science ...
- and Inorganic Chemis ...
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- Thin Solid Films
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- Uppsala University
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