CVD-based tungsten carbide Schottky contacts to 6H-SiC for very high-temperature operation

• In this study, tungsten carbide, with its hardness, chemical inertness, thermal stability and low resistivity (25 mu Omega cm)(1) is shown as a reliable contact material to n- and p-type 6H-SiC for very high temperature applications. WC films with thickne

Ämnesord

NATURVETENSKAP  -- Kemi -- Oorganisk kemi (hsv//swe)

NATURAL SCIENCES  -- Chemical Sciences -- Inorganic Chemistry (hsv//eng)

Nyckelord

Schottky; high temperature; CVD; tungsten carbide; WC; N-TYPE; SILICON-CARBIDE; OHMIC CONTACTS; THIN-FILMS; COBALT; ELECTRONICS; STABILITY

Inorganic chemistry

Oorganisk kemi

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