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Argon ions deeply i...
Argon ions deeply implanted in silicon studied by Rutherford/Elastic Backscattering and Grazing Incidence X-ray Fluorescence spectroscopy
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- Kokkoris, M. (författare)
- Natl Tech Univ Athens, Dept Phys, Zografou Campus, Athens 15780, Greece
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- Androulakaki, E. G. (författare)
- Natl Tech Univ Athens, Dept Phys, Zografou Campus, Athens 15780, Greece
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- Czyzycki, M. (författare)
- Int Atom Energy Agcy IAEA Labs, Nucl Sci & Instrumentat Lab, A-2444 Seibersdorf, Austria;AGH Univ Sci & Technol, Fac Phys & Appl Comp Sci, Al A Mickiewicza 30, PL-30059 Krakow, Poland
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- Erich, M. (författare)
- Univ Belgrade, Vinca Inst Nucl Sci, Lab Phys, POB 552, Belgrade, Serbia
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- Karydas, A. G. (författare)
- Int Atom Energy Agcy IAEA Labs, Nucl Sci & Instrumentat Lab, A-2444 Seibersdorf, Austria;NCSR Demokritos, Xray Fluorescence Anal Lab, Inst Nucl & Particle Phys, Athens 15341, Greece
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- Leani, J. J. (författare)
- Int Atom Energy Agcy IAEA Labs, Nucl Sci & Instrumentat Lab, A-2444 Seibersdorf, Austria;Natl Sci & Tech Res Council CONICET, IFEG, X5000HUA, Cordoba, Argentina
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- Mighori, A. (författare)
- Int Atom Energy Agcy IAEA Labs, Nucl Sci & Instrumentat Lab, A-2444 Seibersdorf, Austria
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- Ntemou, E. (författare)
- Natl Tech Univ Athens, Dept Phys, Zografou Campus, Athens 15780, Greece;NCSR Demokritos, Inst Nucl & Particle Phys, Tandem Accelerator Lab, Athens 15341, Greece
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- Paneta, Valentina (författare)
- Uppsala universitet,Tillämpad kärnfysik
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- Petrovic, S. (författare)
- Univ Belgrade, Vinca Inst Nucl Sci, Lab Phys, POB 552, Belgrade, Serbia
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(creator_code:org_t)
- Elsevier BV, 2019
- 2019
- Engelska.
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Ingår i: Nuclear Instruments and Methods in Physics Research Section B. - : Elsevier BV. - 0168-583X .- 1872-9584. ; 450, s. 144-148
- Relaterad länk:
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https://urn.kb.se/re...
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https://doi.org/10.1...
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Abstract
Ämnesord
Stäng
- Synchrotron-radiation based techniques have recently emerged as serious competitors to traditional nuclear analytical ones, not only in the characterization of various materials, but also when the depth profiling of ultra thin surface layers is concerned. The main goal of the present work was to investigate the applicability of Grazing Incidence X-Ray Fluorescence (GIXRF) and Rutherford/Elastic Backscattering Spectrometry (RBS/EBS) techniques with respect to the accurate quantitative determination of the retained doses of Ar ions deep implanted in random direction of Si [1 1 1] polished crystalline wafers. RBS/EBS measurements with protons and deuterons were taken along with GIXRF ones, the results were compared and an attempt was made to explain the occurring similarities and differences, along with the advantages and weaknesses of each applied analytical technique.
Ämnesord
- NATURVETENSKAP -- Fysik -- Subatomär fysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences -- Subatomic Physics (hsv//eng)
Nyckelord
- EBS/RBS
- GIXRF
- Synchrotron radiation
- Depth profiling
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- art (ämneskategori)
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Kokkoris, M.
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Androulakaki, E. ...
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Czyzycki, M.
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Erich, M.
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Karydas, A. G.
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Leani, J. J.
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visa fler...
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Mighori, A.
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Ntemou, E.
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Paneta, Valentin ...
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Petrovic, S.
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- NATURVETENSKAP
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Nuclear Instrume ...
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Uppsala universitet