WFRF:(Cook N.)
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- Schaepkens, M (author)
Selective SiOs to Si3N4 etching in inductively coupled fluorocarbon plasmas
- Article/chapterEnglish1998
Publisher, publication year, extent ...
- 1998
- printrdacarrier
Numbers
- LIBRIS-ID:oai:DiVA.org:uu-40425
- https://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-40425URI
- https://urn.kb.se/resolve?urn=urn:nbn:se:miun:diva-31607URI
Supplementary language notes
- Language:English
Part of subdatabase
- SwePubSwePub
Classification
Subject headings and genre
- TEKNIK OCH TEKNOLOGIER Elektroteknik och elektronik Annan elektroteknik och elektronik hsv//swe
- ENGINEERING AND TECHNOLOGY Electrical Engineering, Electronic Engineering, Information Engineering Other Electrical Engineering, Electronic Engineering, Information Engineering hsv//eng
- Electronics
- Elektronik
Added entries (persons, corporate bodies, meetings, titles ...)
- Standaert, T E F M (author)
- Reuger, N R (author)
- Oehrlein, G S (author)
- Hedlund, Christer,1964-Uppsala universitet,Institutionen för materialvetenskap,Elektronik,Fasta tillståndets elektronik,Uppsala universitet, Institutionen för materialvetenskap(Swepub:miun)chrhed (author)
- Blom, Hans-OlofUppsala universitet,Institutionen för materialvetenskap,Elektronik,Fasta tillståndets elektronik,Uppsala universitet, Institutionen för materialvetenskap(Swepub:uu)hbl07552 (author)
- Cook, J M (author)
- Uppsala universitetInstitutionen för materialvetenskap (creator_code:org_t)
Related titles
- In:The 25th national symposium UNY-VAC, Albany NY
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