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Thermal Stability of Nanocrystalline Sn-doped In Oxide Films. MICRO-MEMS 2001.
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- Ederth, J (author)
- Uppsala universitet,Institutionen för materialvetenskap,SOLID STATE PHYSICS
- Hultåker, A (author)
- Kish, L.B (author)
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- Niklasson, G.A (author)
- Granqvist, C.G (author)
- van Doorn, A.K (author)
- van Haag, C (author)
- Jongerius, M.J (author)
- Burgard, D (author)
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- (creator_code:org_t)
- 2001
- 2001
- English.
- In: SPIE Int. Symp. Microelectronics and Micro-Electro-Mechanical Systems, Adelaide, Australia, Dec 17-19, paper 4590-49, (2001)..
- Conference paper (other academic/artistic)
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- Hultåker, A
- Kish, L.B
- Niklasson, G.A
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- van Doorn, A.K
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- van Haag, C
- Jongerius, M.J
- Burgard, D
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