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Effect of nitrogen ...
Effect of nitrogen vacancies on the growth, dislocation structure, and decomposition of single crystal epitaxial (Ti1-xAlx)N-y thin films
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- Calamba, Katherine (författare)
- Linköpings universitet,Nanostrukturerade material,Tekniska fakulteten,Univ Lorraine, France; Sandvik Coromant AB, Sweden
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- Salamania, Janella, 1992- (författare)
- Linköpings universitet,Nanostrukturerade material,Tekniska fakulteten,Sandvik Coromant AB, Sweden
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- Johansson, Mats P., 1965- (författare)
- Linköpings universitet,Nanostrukturerade material,Tekniska fakulteten,SECO Tools AB, Sweden
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- Johnson, L. J. S. (författare)
- Sandvik Coromant AB, SE-12679 Stockholm, Sweden.
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- Boyd, Robert, 1972- (författare)
- Linköpings universitet,Plasma och ytbeläggningsfysik,Tekniska fakulteten
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- Pierson, J. F. (författare)
- Univ Lorraine, IJL, CNRS, F-54000 Nancy, France.
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- Sortica, Mauricio A. (författare)
- Uppsala universitet,Tandemlaboratoriet,Uppsala Univ, Sweden
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- Primetzhofer, Daniel (författare)
- Uppsala universitet,Tillämpad kärnfysik,Tandemlaboratoriet,Uppsala Univ, Sweden
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- Odén, Magnus, 1965- (författare)
- Linköpings universitet,Nanostrukturerade material,Tekniska fakulteten
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(creator_code:org_t)
- Elsevier, 2021
- 2021
- Engelska.
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Ingår i: Acta Materialia. - : Elsevier. - 1359-6454 .- 1873-2453. ; 203
- Relaterad länk:
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Abstract
Ämnesord
Stäng
- The effect of varying nitrogen vacancies on the growth, microstructure, spinodal decomposition and hardness values of predominantly single crystal cubic phase c-(Ti1-xAlx)N-y films was investigated. Epitaxial c-(Ti1-xAlx)N-y films with y = 0.67, 0.79, and 0.92 were grown on MgO(001) and MgO(111) substrates by magnetron sputter deposition. High N vacancy c-(Ti1-xAlx)N-0.67 films deposited on MgO(111) contained coherently oriented w-(0001) structures while segregated conical structures were observed on the films grown on MgO(001). High resolution STEM images revealed that the N-deficient growth conditions induced segregation with small compositional fluctuations that increase with the number of N vacancies. Similarly, strain map analysis of the epitaxial c-(Ti1-xAlx)N-y (001) and (111) films show fluctuations in strain concentration that scales with the number of N vacancies and increases during annealing. The spinodal decomposition coarsening rate of the epitaxial c-(Ti1-xAlx)N-y films was observed to increase with decreasing N vacancies. Nanoindentation showed decreasing trends in hardness of the as-deposited films as the N vacancies increase. Isothermal post-anneal at 1100 degrees C in vacuum for 120 min revealed a continuation in the increase in hardness for the film with the largest number of N vacancies (y = 0.67) while the hardness decreased for the films with y = 0.79 and 0.92. These results suggest that nitrogen-deficient depositions of c-(Ti1-xAlx)N-y films help to promote a self-organized phase segregation, while higher N vacancies generally increase the coherency strain which delays the coarsening process and can influence the hardness at high temperatures.
Ämnesord
- TEKNIK OCH TEKNOLOGIER -- Materialteknik -- Metallurgi och metalliska material (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Materials Engineering -- Metallurgy and Metallic Materials (hsv//eng)
- TEKNIK OCH TEKNOLOGIER -- Materialteknik -- Annan materialteknik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Materials Engineering -- Other Materials Engineering (hsv//eng)
Nyckelord
- Thin Films
- Nitrogen vacancies
- TiAlN system
- spinodal decomposition
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Calamba, Katheri ...
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Salamania, Janel ...
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Johansson, Mats ...
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Johnson, L. J. S ...
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Boyd, Robert, 19 ...
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Pierson, J. F.
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Sortica, Maurici ...
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Primetzhofer, Da ...
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Odén, Magnus, 19 ...
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TEKNIK OCH TEKNO ...
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- TEKNIK OCH TEKNOLOGIER
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TEKNIK OCH TEKNO ...
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Acta Materialia
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