Controllable growth of ZnO nanowires grown on discrete islands of Au catalyst for realization of planar-type micro gas sensors

• The proper engineering design of gas sensors and the controlled synthesis of sensing materials for the high-performance detection of toxic gas are very important in the fabrication of handheld devices. In this study, an effective design for gas sensor chips is developed to control the formation of grown ZnO nanowires (NWs).The design utilizes the dendrite islands of Au catalyst deposited on and between Pt electrodes of a planar-type micro gas sensor so that NWs can grow on instead of a continuous Au seed layer. This method results in an increase of NW-NW junctions on the device and also eliminates current leakage through the seed layer, which results in a higher sensitivity. The results show that the developed gas-sensing devices could be used to monitor NO2 at moderate temperature (~250 °C) and/or ethanol at a high temperature (~400 °C).

Nyckelord

ZnO nanowires

on-chip growth

MEMS

planar-type sensors

Teknisk fysik med inriktning mot mikrosystemteknik

Engineering Science with specialization in Microsystems Technology

Engineering Science with specialization in Materials Science

Teknisk fysik med inriktning mot materialvetenskap

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