WFRF:(Pasquariello D)
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Point defects generated by direct-wafer bonding of silicon
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- Dózsa, (author)
- Uppsala universitet,Institutionen för materialvetenskap,MATERIALS SCIENCE /MICROSYSTEMS TECHNOLOGY
- Szentpáli, B (author)
- Pasquariello, D (author)
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- Hjort, K (author)
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- (creator_code:org_t)
- 2002
- 2002
- English.
- In: J. of Electronic Materials. ; 31:2, s. 113-118
- Journal article (peer-reviewed)
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Subject headings
- TEKNIK OCH TEKNOLOGIER -- Materialteknik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Materials Engineering (hsv//eng)
Keyword
- Materials science
- Teknisk materialvetenskap
Publication and Content Type
- ref (subject category)
- art (subject category)
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- Dózsa,
- Szentpáli, B
- Pasquariello, D
- Hjort, K
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- Uppsala University
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