Magnetron sputtering of the high entropy alloy CoCrFeMnNi on 316L : Influence of substrate grain orientations

• This study explores the influence of a 316L stainless steel substrate on the magnetron sputtering of the Cantor alloy CoCrFeMnNi at different substrate bias. The study was carried out on a polycrystalline 316L substrate where the growth behavior of the coating could be investigated on grains with different orientations. By combining electron backscatter diffraction (EBSD) before and after deposition and characterization of the same area, it was possible to determine growth behaviour and surface morphologies on individual substrate grains. No strong influence of the substrate was observed at a floating bias. At a bias of -100V, however, the coating was strongly influenced by the orientation of the individual substrate grains.  Epitaxial coating grains with a smooth surface were observed on the [102]-oriented grains while a more columnar growth was observed on [111]-oriented grains.  Furthermore, a small difference in growth rate was observed on different substrate orientations. The growth behaviour could be related to differences in surface energies and diffusion rates on different surface orientations.

Ämnesord

NATURVETENSKAP  -- Kemi -- Materialkemi (hsv//swe)

NATURAL SCIENCES  -- Chemical Sciences -- Materials Chemistry (hsv//eng)

Nyckelord

thin film

coating

high entropy alloy

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