Making the diamond vortex phase masks for the METIS instrument

• Direct observation of exoplanets and proto-planetary disks with the METIS instrument at the Extremely Large Telescope will provide new insights into the processes of planet formation and exoplanet atmospheres. This will be possible thanks to a powerful vector vortex coronagraph that can suppress the starlight to reveal faint signals around it. Here we present the process of making the phase masks at the heart of the coronagraph. These annular groove phase masks consist of deep sub-wavelength gratings in diamond that are etched using inductively coupled oxygen plasma with a strong bias. The METIS instrument requires a wider bandwidth than such components have previously been demonstrated for, leading to a grating design with higher aspect ratio and more vertical walls. To achieve this, the etch mask used for diamond etching was changed from aluminium to silicon and the plasma power was increased. We also improved on our method for reducing the grating depth of finished components to fine-tune them. Together with improved optical testing, this allowed us to produce the best vortex phase masks so far demonstrated for the astronomical N-band.

Ämnesord

TEKNIK OCH TEKNOLOGIER  -- Annan teknik -- Övrig annan teknik (hsv//swe)

ENGINEERING AND TECHNOLOGY  -- Other Engineering and Technologies -- Other Engineering and Technologies not elsewhere specified (hsv//eng)

NATURVETENSKAP  -- Fysik -- Astronomi, astrofysik och kosmologi (hsv//swe)

NATURAL SCIENCES  -- Physical Sciences -- Astronomy, Astrophysics and Cosmology (hsv//eng)

NATURVETENSKAP  -- Fysik -- Atom- och molekylfysik och optik (hsv//swe)

NATURAL SCIENCES  -- Physical Sciences -- Atom and Molecular Physics and Optics (hsv//eng)

Nyckelord

Diamond microfabrication

Reactive ion etching

Optical gratings

Infrared optics

Astronomy

Exoplanets

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