In situ diagnostic studies of reactive co-sputtering from two targets by means of soft x-ray and optical emission spectroscopy

• Fabrication of electronic and optical devices involves synthesis of tailor-made materials with complex composition. Reactive co-sputtering from two targets is a suitable process for fabrication of, e.g., a two-element nitride compound material. The compos

Ämnesord

TEKNIK OCH TEKNOLOGIER  -- Elektroteknik och elektronik -- Annan elektroteknik och elektronik (hsv//swe)

ENGINEERING AND TECHNOLOGY  -- Electrical Engineering, Electronic Engineering, Information Engineering -- Other Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)

Nyckelord

CHEMICAL-ANALYSIS; IN-SITU; DEPOSITION; FILM; SPECTROMETRY

Electronics

Elektronik

Publikations- och innehållstyp

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