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Magnetron sputtered epitaxial single-phase Ti3SiC2 thin films

Palmquist, Jens-Petter (author)
Uppsala universitet,Institutionen för materialkemi
Jansson, U (author)
Seppänen, T (author)
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Persson, P O Å (author)
Birch, J (author)
Hultman, L (author)
Isberg, P (author)
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 (creator_code:org_t)
2002
2002
Undefined language.
In: Applied Physics Letters. ; :81, s. 835-
  • Journal article (peer-reviewed)
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Palmquist, Jens- ...
Jansson, U
Seppänen, T
Persson, P O Å
Birch, J
Hultman, L
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Isberg, P
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