WFRF:(Westlinder Jörgen)
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Investigation of the thermal stability of reactively sputter deposited TiN MOS gate electrodes
- Sjöblom, Gustaf (author)
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- Westlinder, Jörgen (author)
- Uppsala universitet,Institutionen för teknikvetenskaper
- Olsson, Jörgen (author)
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- In: IEEE Transaction on electron devices.
- Journal article (peer-reviewed)
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