Basic Concepts of Moving-Sidewall Tuneable Capacitors for RF MEMS Reconfigurable Filters

↓ Direkt till sidans innehåll
↓ Direkt till sidans sekundära innehåll (sidomenyn)

Search: WFRF:(Sanders SB) > Basic Concepts of M...

Details
MARC

Shah, UmerKTH,Mikrosystemteknik,RF MEMS (author)

Basic Concepts of Moving-Sidewall Tuneable Capacitors for RF MEMS Reconfigurable Filters

Article/chapterEnglish2011

Publisher, publication year, extent ...

The European Microwave Association,2011
electronicrdacarrier

Numbers

LIBRIS-ID:oai:DiVA.org:kth-50164
https://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-50164URI
https://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-271584URI

Supplementary language notes

Language:English
Summary in:English

Part of subdatabase

SwePubSwePub

Classification

Subject category:ref swepub-contenttype
Subject category:kon swepub-publicationtype

Notes

QC 20111213
Not duplicate with DiVA 461175.QC 20200422. QC 20220211
This paper presents for the first time MEMS tuneablefilters, where the reconfiguration of the filter is achieved bymoving the sidewalls of a 3D micromachined transmission line.The sidewalls of the transmission line are moved by MEMSelectrostatic actuators completely integrated into the groundlayers of a thick-film coplanar waveguide. Multi-step actuatorshave been utilized for achieving a tuning range of up to 2.41 forthe tuneable capacitance elements. Two different 3Dtransmission line metallization schemes and two differentconcepts for tuning the capacitive load have been investigatedfor constructing filters based on this novel tuning mechanism.Measurements of fabricated devices have revealed that 3Dtransmission lines with top metallization only, and capacitorsavoiding the routing of the RF signal over mechanical-springmeanders achieve the best results. A successfully implementedfilter based on this configuration is shown, with a passbandinsertion and return loss of 5 and 12 dB, respectively, at a centerfrequency of 20 GHz. Various MEMS actuators designs withspring constants from 3.5 to 95 N/m have been implemented,resulting in actuation voltages of 15.4 to 73 V. The self-actuationpower simulated in a non-linear Agilent Advanced DesignSystem model has been estimated to 40 and 50 dBm for the softand the stiff spring actuators, respectively. The fabrication isdone by a single-mask silicon-on-insulator RF MEMS process.

Subject headings and genre

TEKNIK OCH TEKNOLOGIER Elektroteknik och elektronik Annan elektroteknik och elektronik hsv//swe
ENGINEERING AND TECHNOLOGY Electrical Engineering, Electronic Engineering, Information Engineering Other Electrical Engineering, Electronic Engineering, Information Engineering hsv//eng
TEKNIK OCH TEKNOLOGIER Elektroteknik och elektronik hsv//swe
ENGINEERING AND TECHNOLOGY Electrical Engineering, Electronic Engineering, Information Engineering hsv//eng
RF MEMS
tuneable filters
micromachined transmission lines

Added entries (persons, corporate bodies, meetings, titles ...)

Sterner, MikaelKTH,Mikrosystemteknik,RF MEMS(Swepub:kth)u1ylclf0 (author)
Oberhammer, JoachimKTH,Mikrosystemteknik,RF MEMS(Swepub:kth)u12600dy (author)
Sterner, MartinKTH,Mikrosystemteknik(Swepub:kth)u1vwe7hg (author)
KTHMikrosystemteknik (creator_code:org_t)

Related titles

In:6th European Microwave Integrated Circuits (EuMIC) Conference: The European Microwave Association, s. 526-529, s. 1087-1090
In:2011 41ST EUROPEAN MICROWAVE CONFERENCE: The European Microwave Association, s. 526-529, s. 1087-10909782874870224

Internet link

http://www.eumweek.com/2011/EuMIC.asp?id=cConference website
https://kth.diva-portal.org/smash/get/diva2:461175/FULLTEXT01.pdffulltext:postprint
https://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-50164
https://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-271584

Find in a library

6th European Microwave Integrated Circuits (EuMIC) Conference (Search for host publication in LIBRIS)

To the university's database

Find more in SwePub

By the author/editor: Shah, Umer; Sterner, Mikael; Oberhammer, Joac ...; Sterner, Martin

About the subject

ENGINEERING AND TECHNOLOGY: ENGINEERING AND ...; and Electrical Engin ...; and Other Electrical ...

ENGINEERING AND TECHNOLOGY: ENGINEERING AND ...; and Electrical Engin ...

Articles in the publication: 6th European Mic ...; 2011 41ST EUROPE ...

By the university: Royal Institute of Technology

Search outside SwePub

Extend your search to:: Google; Google Book Search; Google Scholar

Kungliga biblioteket hanterar dina personuppgifter i enlighet med EU:s dataskyddsförordning (2018), GDPR. Läs mer om hur det funkar här.
Så här hanterar KB dina uppgifter vid användning av denna tjänst.

LIBRIS.kb.se